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Ferroelectric Dielectrics Integrated on Silicon

Wiley, J,
E-Book ( EPUB mit Adobe DRM )
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This book describes up-to-date technology applied to high-Kmaterials for More Than Moore applications, i.e. microsystemsapplied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-Kdielectrics thin films including extrinsic effects, this bookemphasizes the specificity of thin films. Deposition and patterningtechnologies are then presented. A whole chapter is dedicated tothe major role played in the field by X-Ray Diffractioncharacterization, and other characterization techniques are alsodescribed such as Radio frequency characterization. An in-depthstudy of the influence of leakage currents is performed togetherwith reliability discussion. Three applicative chapters coverintegrated capacitors, variables capacitors and ferroelectricmemories. The final chapter deals with a reasonably new researchfield, multiferroic thin films.


Titel: Ferroelectric Dielectrics Integrated on Silicon
Autoren/Herausgeber: Emmanuel Defaÿ (Hrsg.)
Ausgabe: 1. Auflage

ISBN/EAN: 9781118602805

Seitenzahl: 462
Produktform: E-Book
Sprache: Englisch - Newsletter
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