Right from the beginning, a few decades ago, MEMS (Micro-Electro-Mechanical-
Systems) technology was regarded as a worldwide key technology with enormous
potential for the 21th century. The market for MEMS has grown around
20% per year over the last decade and MEMS products are meanwhile used in
various fields, e. g. in the automation, automotive or bio-medical sector, to enhance
conventional applications or to open new areas of technology. MST (Micro-
Systems-Technology) allows the production of such systems with extreme
mechanical precision and high repetition accuracy.