Suche ›

Plasma-Surface Interactions and Processing of Materials

379,85 € Lieferbar in 5-7 Tagen
Dieses Produkt ist auch verfügbar als:


Proceedings of the NATO Advanced Study Institute, Alicante, Spain, September 4-16, 1988


Titel: Plasma-Surface Interactions and Processing of Materials
Autoren/Herausgeber: O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm (Hrsg.)
Aus der Reihe: NATO Science Series E
Ausgabe: 1990

ISBN/EAN: 9780792305842

Seitenzahl: 558
Format: 23,4 x 15,6 cm
Produktform: Hardcover/Gebunden
Gewicht: 2,160 g
Sprache: Englisch

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers. - Newsletter
Möchten Sie sich für den Newsletter anmelden?

Bitte geben Sie eine gültige E-Mail-Adresse ein.
Lieber nicht