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Principles of Plasma Discharges and Materials Processing

Wiley, J,
E-Book ( PDF mit Adobe DRM )
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A Thorough Update of the Industry Classic on Principles of PlasmaProcessing
The first edition of Principles of Plasma Discharges and MaterialsProcessing, published over a decade ago, was lauded for itscomplete treatment of both basic plasma physics and industrialplasma processing, quickly becoming the primary reference forstudents and professionals.
The Second Edition has been carefully updated and revised toreflect recent developments in the field and to further clarify thepresentation of basic principles. Along with in-depth coverage ofthe fundamentals of plasma physics and chemistry, the authors applybasic theory to plasma discharges, including calculations of plasmaparameters and the scaling of plasma parameters with controlparameters.
New and expanded topics include:
* Updated cross sections
* Diffusion and diffusion solutions
* Generalized Bohm criteria
* Expanded treatment of dc sheaths
* Langmuir probes in time-varying fields
* Electronegative discharges
* Pulsed power discharges
* Dual frequency discharges
* High-density rf sheaths and ion energy distributions
* Hysteresis and instabilities
* Helicon discharges
* Hollow cathode discharges
* Ionized physical vapor deposition
* Differential substrate charging
With new chapters on dusty plasmas and the kinetic theory ofdischarges, graduate students and researchers in the field ofplasma processing should find this new edition more valuable thanever.


Titel: Principles of Plasma Discharges and Materials Processing
Autoren/Herausgeber: Michael A. Lieberman, Alan J. Lichtenberg
Ausgabe: 2. Auflage

ISBN/EAN: 9780471724247

Seitenzahl: 730
Produktform: E-Book
Sprache: Englisch

MICHAEL A. LIEBERMAN, PhD, is Professor in the Graduate School inElectrical Engineering at the University of California, Berkeley.He has published more than 170 journal articles on the topics ofplasmas, plasma processing, and nonlinear dynamics. He has alsocoauthored, with Professor Lichtenberg, Regular and StochasticMotion and Regular and Chaotic Dynamics, Second Edition.
ALLAN J. LICHTENBERG, PhD, is Professor in the Graduate Schoolin Electrical Engineering at the University of California,Berkeley. A respected pioneer in the fields of high-temperatureplasmas, plasma discharges, and nonlinear dynamics, he haspublished about 150 articles in these areas. In addition to thebooks coauthored with Professor Lieberman, he has written anearlier monograph Phase-Space Dynamics of Particles (Wiley).

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