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Rapid Thermal Processing

Science and Technology

von
Elsevier Science,
E-Book ( EPUB mit Adobe DRM )
In Ihrem Land nicht verfügbar

Kurzbeschreibung

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Details

Titel: Rapid Thermal Processing

ISBN/EAN: 9780323139809

Seitenzahl: 430
Produktform: E-Book
Sprache: Englisch

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